A Brief Review of Growth Techniques for Obtaining of III-V Semiconductor Compounds
##plugins.themes.bootstrap3.article.main##
Electronic devices have essential importance in our quality of life. Our species has multiple comforts and benefits obtained by current technology, such as microelectronics, optoelectronics, and nanotechnology. However, few are interested in the different physical phenomena that are behind our technology. This paper presents a brief review of four growth techniques for the obtaining of III-V semiconductors compounds. Techniques such as metalorganic chemical vapor deposition, hot filament chemical vapor deposition, liquid phase epitaxy, and molecular beam epitaxy are described in a simple way to motivate the understanding of the theoretical concepts that make operated our technology.
Downloads
Download data is not yet available.
References
-
W.F. Brinkman, D.E. Haggan, W.W. Troutman, A history of the invention of the transistor and where it will lead us. IEEE Journal of Solid-State Circuits. (32) (12) (1997) 1858 – 1865. DOI: 10.1109/4.643644
Google Scholar
1
-
O. Ambacher, Growth and applications of group III-nitrides, J. Phys. D Appl. Phys. 31 (1998) 2653–2710. DOI: 10.1088/0022-3727/31/20/001
Google Scholar
2
-
L. Liu, J.H. Edgar, Substrates for gallium nitride epitaxy, Mater. Sci. Eng. R 37 (2002) 61–127. DOI: https://doi.org/10.1016/S0927-796X(02)00008-6
Google Scholar
3
-
Robert F. Davis, Nitrides for electronic and optoelectronic applications, Proc. IEEE 79 (5) (1991) 702–712. DOI: 10.1109/5.90133.
Google Scholar
4
-
H. Amano, et al., The 2018 GaN power electronics roadmap, J. Phys. D Appl. Phys. 51 (2018) 1-48. DOI: https://doi.org/10.1088/1361-6463/aaaf9d.
Google Scholar
5
-
A. Denis, G. Goglio, G. Demazeau, Gallium nitride bulk crystal growth processes: A review, Mater. Sci. Eng. R 50 (2006) 167–194. DOI: https://doi.org/10.1016/j.mser.2005.11.001.
Google Scholar
6
-
H.M. Manasevit, Single-crystal gallium arsenide on insulating substrates. Applied Physics Letters 12(4)(1968) 156 – 159. DOI: https://doi.org/10.1063/1.1651934.
Google Scholar
7
-
J.J. Coleman, Metalorganic chemical vapor deposition for optoelectronic devices. Proceedings of the IEEE 85(11)(1997) 1715 – 1729. DOI: 10.1109/5.649647
Google Scholar
8
-
J.I. Davies, G. Fan, J.O. Williams, Metal-organic Chemical Vapour Deposition (MOCVD) of Compounds Semiconductors, Part 1.- Optimisation of Reactor Design for the Preparation of ZnSe J. Chem. Soc, Faraday Trans. l. 81(1985) 2711 – 2722 DOI:10.1039/F19858102711
Google Scholar
9
-
J.I. Pankove, T.D. Moustakas, Gallium Nitride (GaN) I. Edi. Acamic Press. 1998. USA.
Google Scholar
10
-
H. Vilchis, V.M. Sanchez, R.A. Escobosa, Cubic GaN layers grown by metalorganic chemical vapor deposition on GaN templates obtained by nitridation of GaAs, Thin Solid Films 520 (2012) 5191–5194 DOI: 10.1016/j.tsf.2012.03.123
Google Scholar
11
-
C. Guarneros, V. Sánchez, Magnesium doped GaN grown by MOCVD, Mater. Sci. Eng. B 174 (2010) 263–265. DOI: 10.1016/j.mseb.2010.03.022
Google Scholar
12
-
J.K. Hite, T.J. Anderson, L.E. Luna, J.C. Gallagher, M.A. Mastro, J.A. Freitas, C.R. Eddy Jr., Influence of HVPE substrates on homoepitaxy of GaN grown by MOCVD, J. Cryst. Growth 498 (2018) 352–356. https://doi.org/10.1016/j.jcrysgro.2018.06.032
Google Scholar
13
-
H. Matsumura, H. Umemoto, K. K. Gleason, R.E.I. Schropp, Catalytic chemical vapor deposition, Wiley-vch, Germany 2019.
Google Scholar
14
-
M.G. Astles Liquid Phase Epitaxial Growth of III - V Compound Semiconductor Materials and their Device Applications, Adam Hilger USA 1990. DOI: https://doi.org/10.1002/crat.2170300406
Google Scholar
15
-
A.J. Downs, Chemistry of Aluminum, Gallium, Indium and Thallium, Springer Netherlands 1993.
Google Scholar
16
-
H. Nelson, Liquid-phase epitaxy—its role in crystal growth technology, J. Cryst. Growth 27(1974) 1-5. DOI: https://doi.org/10.1016/S0022-0248(74)80045-X
Google Scholar
17
-
E. Gastellou, Crecimiento y caracterización de películas cuaternarias de AlGaAsSb sobre GaSb por LPE a bajas temperaturas, Tesis de Maestría, CIDS-ICUAP-BUAP, 2000.
Google Scholar
18
-
H.C. Casey JR, M.B. Panish, Heterostructure lasers Part B: Materials and operating characteristics, Academic Press, USA 1978.
Google Scholar
19
-
W.C. Yang, P.Y. Lee, H.Y. Tseng, C.W. Lin, Y.T. Tseng, K.Y. Cheng, Mg incorporation in GaN grown by plasma-assisted molecular beam epitaxy at high temperatures, J.Cryst. Growth 439 (2016) 87–92. DOI: https://doi.org/10.1016/j.jcrysgro.2016.01.011
Google Scholar
20
-
H. Okumura, S. Misawa, S. Yoshida, Epitaxial growth of cubic and hexagonal GaN on GaAs by gas-source molecular-beam epitaxy, Appl. Phys. Lett. 59 (9) (1991) 1058–1060. DOI: https://doi.org/10.1016/0039-6028(92)91086-Q
Google Scholar
21
-
Ch. Ramesh, P. Tyagi, B. Bhattacharyya, S. Husale, K.K. Maurya, M. Senthil Kumar, S.S. Kushvaha, Laser molecular beam epitaxy growth of porous GaN nanocolumn and nanowall network on sapphire (0001) for high responsivity ultraviolet photodetectors, J. Alloys Compd. 770 (2019) 572–581. DOI: https://doi.org/10.1016/j.jallcom.2018.08.149
Google Scholar
22
-
Y. Wu, Y. Wang, K. Sun, A. Aiello, P. Bhattacharya, Z. Mi, Molecular beam epitaxy and characterization of Mg-doped GaN epilayers grown on Si (001) substrate through controlled nanowire coalescence, J. Cryst. Growth 498 (2018) 109–114. DOI: 10.1016/j.jcrysgro.2018.06.008.
Google Scholar
23
Most read articles by the same author(s)
-
Erick Gastellóu,
Crisoforo Morales,
Godofredo García,
Rafael García,
Gustavo Alonso Hirata,
Ana María Herrera,
Reina Galeazzi,
Enrique Rosendo,
Tomas Díaz,
Roman Romano,
Antonio Coyopol,
Structural and Optical Changes of Undoped GaN Layers Grown via Radio-frequency Magnetron Sputtering Obtained from GaN Powders , European Journal of Engineering and Technology Research: Vol. 4 No. 2: FEBRUARY 2019 -
Ana Maria Herrera,
Godofredo García,
Erick Gastellóu,
Fabiola Nieto,
Rafael García,
Gustavo Alonso Hirata,
Oscar Edel Contreras,
Crisoforo Morales,
Enrique Rosendo,
Tomas Díaz,
Hexagonal Nanocrystals into AlGaN Powders Obtained via Pyrolysis from an Organometallic Compound , European Journal of Engineering and Technology Research: Vol. 4 No. 3: MARCH 2019